Updated July 2026

GF Singapore Fab Equipment Catalog

	Wafer Size: 200mm Maker: NIKON Model: EX14 Process: DUV STEPPER
	Wafer Size: 200mm Maker: SCP Model: 9400 Process: NITRIDE REMOVAL
	Wafer Size: 200mm Maker: SANKYO Model: SWH80 Process: EKC CLEAN
	Wafer Size: 200mm Maker: GASONICS Model: PEP3510A Process: RESIST STRIP Cu
	Wafer Size: 200mm Maker: NIKON Model: I14 Process: ILINE STEPPER
	Wafer Size: 200mm Maker: KLA Model: ARCHER A10XT Process: OVERLAY
	Wafer Size: 200mm Maker: AMAT Model: CENTURA EMXP+ Process: E95 ETCH
	Wafer Size: 200mm Maker: TEL Model: P8LC Process: PROBER
	Wafer Size: 200mm Maker: VERTEQ Model: 1800 Process: SPIN RINSE DRY
	Wafer Size: 200mm Maker: TEL/FSI Model: ZETA Process: CHEMICAL RESIST STRIP
	Wafer Size: 200mm Maker: TEL Model: ZETA Process: SALICIDE STRIP - COSI2
	Wafer Size: 200mm Maker: KLA Model: 5240
	Wafer Size: 200mm Maker: SANKYO Model: SWH80
	Wafer Size: 200mm Maker: KLA Model: 2138 Process: KLA 2138 KLA 2138
	Wafer Size: 300mm Maker: DESPATCH Model: PWC-48X38X64-3E - Drying Oven Process: Drying Oven
	Wafer Size: 300mm Maker: JEOL Model: ARM200CF SuperX SuperX Process: JEOL ARM200CF SuperX SuperX
	Wafer Size: 300mm Maker: BRUKER Model: D8-GADDS microfocus Process: Material Analysis
	Wafer Size: 300mm Maker: BRUKER Model: AXS TXS Process: Material Analysis
	Wafer Size: 300mm Maker: CAMECA Model: 4000X Si std Process: Material Analysis
	Wafer Size: 300mm Maker: Park System Model: NX HiVac Process: XRD_Bruker
	Wafer Size: 300mm Maker: CAMECA Model: Cameca APT Flex TAP Process: Material Analysis
	Wafer Size: 300mm Maker: KOBELCO Model: KOBELCO V500 Process: Material Analysis
	Wafer Size: 300mm Maker: TORR International Model: MSS3G2 Process: Material Analysis
	Wafer Size: 300mm Maker: AMAT Model: SEMVision G5 HP Process: AMAT SEMVision G5 HP AMAT SEMVision G5 HP [7nm, 10nm, 14nm]
	Wafer Size: 300mm Maker: HITACHI KOKUSAI Model: DJ1236VN - BOAT1 - LowK SiN Process: FVX39x_LowK_ALDSIN
	Wafer Size: 300mm Maker: TEL Model: INDYPLUS IRAD - BOAT1 - MLD HK Process: TEL TACTRUS VIGUS ATCC [ILDEtch_HM]
	Wafer Size: 300mm Maker: HITACHI KOKUSAI Model: DJ-1236VN-DF - BOAT1, BOAT2 TiN_ALD Process: FVX48x_TiN_ALD
	Wafer Size: 300mm Maker: ASM Model: MIR3000 - PM1, PM2 - PE_ALD Oxide Process: RTA43x_PE_ALD Oxide
	Wafer Size: 300mm Maker: MATTSON Model: MILLIOS HVM - PM1 Process: HVM - PM1
	Wafer Size: 300mm Maker: RUDOLPH Model: S3000S Process: TFM_THK_Rudolph
	Wafer Size: 300mm Maker: LAM Model: SABRE EXCEL - CELL 1-3, HA 1-6, PEM 1-3 Process: LAM SABRE EXCEL - CELL 1-3, HA 1-6, PEM 1-3
	Wafer Size: 300mm Maker: BRUKER Model: AFM-D500 Process: Material Analysis
	Wafer Size: 300mm Maker: OXFORD INSTRUMENTS Model: OpAL RPT ALD for Hafnium Process: PFA
	Wafer Size: 300mm Maker: HSEB Model: AXIOSPECT 301 Process: Optical Review
	Wafer Size: 300mm Maker: AMAT Model: CENTURA Process: AMAT CENTURA CHC/CHD - 2 SiCONi CH - EPI2300 ID Change AMAT CENTURA CHC/CHD - 2 SiCONi CH - EPI2300 ID Change
	Wafer Size: 300mm Maker: HITACHI KOKUSAI Model: DJ-1236VN-DF - BOAT1, BOAT2 TiN_ALD
	Wafer Size: 300mm Maker: TEL Model: TACTRAS VIGUS ATCC - 6ch - ILDEtch_HM 6CH - PM1,2,5,6 - LK2 BSP w/ 200mm exhaust, PM3,4 - LK3 QRE + ALE Rev1 ESC Process: ILDEtch_HM
	Wafer Size: 300mm Maker: Bruker Model: D8 FABLINE Process: XRD_Bruker
	Wafer Size: 300mm Maker: WONIK IPS Model: MAHA MP - PMA-SiON, PMB-SiON, PMC-SiON Process: WONIK IPS MAHA MP - PMA-SiON, PMB-SiON
	Wafer Size: 300mm Maker: SEMES Model: LOZIX H-SOH 4C Process: SEMES LOZIX 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP
	Wafer Size: 300mm Maker: TEL Model: TACTRAS with VIGUS Ix BSP Chambers Process: SEMES LOZIX 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP SEMES LOZIX 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP
	Wafer Size: 300mm Maker: AMAT Model: LK Prime S
	Wafer Size: 300mm Maker: SEMES Model: LOZIX H-SOH 4C Process: SEMES LOZIX 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP